How Low was paid
$5.1M in total for 2025, as reported in the Summary Compensation Table. Equity awards are valued at grant, not at what they turned out to be worth.
Named executive officers
| Executive | Salary | Stock | Incentive | Other | Total |
|---|---|---|---|---|---|
| Russell J. LowPresident and Chief Executive Officer | $608,654 | $3,852,701 | $627,522 | $11,517 | $5,100,394 |
| James G. CooganExecutive Vice President and Chief Financial Officer | $466,346 | $1,541,055 | $336,562 | $11,517 | $2,355,480 |
| Eileen J. EvansExecutive Vice President, HR and Legal, and General Counsel | $384,615 | $898,938 | $237,923 | $91,517 | $1,612,994 |
| Gerald M. BlumenstockExecutive Vice President, Research, Development, and Engineering | $312,500 | $770,590 | $193,313 | $11,449 | $1,287,852 |
| Gregory F. RedinboExecutive Vice President, Marketing and Applications | $312,500 | $770,590 | $193,313 | $11,449 | $1,287,852 |
| Christopher J. TatnallExecutive Vice President, Global Customer Operations | $312,500 | $770,590 | $193,313 | $11,449 | $1,287,852 |
What changed and why
- $5.1MCEO total compensation increased to $5,100,394 in 2025 compared to $4,293,508 in 2024.
- Base salaries for named executive officers were reduced due to a two-week company-wide furlough in 2025.
- 112.5%Performance-based restricted stock units were earned at 112.5 percent based on operational goals.
- Annual cash incentives were paid under the 2025 Axcelis Team Incentive Plan based on financial metrics.
About this page
Figures are automated and can be wrong; check the filing for the exact numbers. Totals follow SEC rules, which value stock and option awards at grant. Read the DEF 14A proxy statement for footnotes and the compensation committee's full reasoning.