Amtech Systems (ASYS) executive compensation, 2026 proxy

Robert C. Daigle, Chief Executive Officer, President and Chairman of the Board, was paid $723,580 in 2025, down 49% from $1.4M the year before.

Filed
January 23, 2026
Annual meeting
March 4, 2026
Pay year
2025
Named executives
2
CEO total pay
$723,580-49% vs prior year
CEO Base Salary
$450,000Unchanged from prior year
CEO Option Awards
$259,410Grant date fair value

How Daigle was paid

$723,580 in total for 2025, as reported in the Summary Compensation Table. Equity awards are valued at grant, not at what they turned out to be worth.

Salary62%Option awards36%All other compensation2%

Named executive officers

ExecutiveTotal
Robert C. DaigleChief Executive Officer, President and Chairman of the Board$723,580
Wade M. JenkeVice President, Chief Financial Officer$428,529

What changed and why

  • $724KChief executive officer total compensation decreased to $723,580 in fiscal 2025 from $1,411,299 in fiscal 2024.No cash bonuses were awarded to named executive officers in fiscal 2025.Wade M. Jenke served as chief financial officer and received total compensation of $428,529.

About this page

Figures are automated and can be wrong; check the filing for the exact numbers. Totals follow SEC rules, which value stock and option awards at grant. Read the DEF 14A proxy statement for footnotes and the compensation committee's full reasoning.